JPH034816B2 - - Google Patents
Info
- Publication number
- JPH034816B2 JPH034816B2 JP60068215A JP6821585A JPH034816B2 JP H034816 B2 JPH034816 B2 JP H034816B2 JP 60068215 A JP60068215 A JP 60068215A JP 6821585 A JP6821585 A JP 6821585A JP H034816 B2 JPH034816 B2 JP H034816B2
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- joists
- hollow frame
- lattice
- filter mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60068215A JPS61225527A (ja) | 1985-03-29 | 1985-03-29 | クリ−ンル−ム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60068215A JPS61225527A (ja) | 1985-03-29 | 1985-03-29 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61225527A JPS61225527A (ja) | 1986-10-07 |
JPH034816B2 true JPH034816B2 (en]) | 1991-01-24 |
Family
ID=13367350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60068215A Granted JPS61225527A (ja) | 1985-03-29 | 1985-03-29 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61225527A (en]) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0248019Y2 (en]) * | 1985-07-06 | 1990-12-17 | ||
JPH0233550A (ja) * | 1988-07-25 | 1990-02-02 | Fuorumu Sekkei Jimusho:Kk | クリーンルーム |
JP2539960Y2 (ja) * | 1988-10-25 | 1997-07-02 | 株式会社竹中工務店 | クリーンルームの間仕切り装置 |
JP2507121B2 (ja) * | 1990-02-28 | 1996-06-12 | 松下電器産業株式会社 | 留守番電話装置 |
JPH048029U (en]) * | 1990-05-07 | 1992-01-24 | ||
JP4557316B2 (ja) * | 1997-07-24 | 2010-10-06 | Okiセミコンダクタ株式会社 | 半導体素子の製造方法、および半導体素子製造用処理室 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58195498U (ja) * | 1982-06-22 | 1983-12-26 | 凸版印刷株式会社 | 電磁波シ−ルド用転写箔 |
JPH0636477B2 (ja) * | 1983-01-27 | 1994-05-11 | 大日本印刷株式会社 | 電磁波遮蔽層転写シ−ト |
JPS59121855U (ja) * | 1983-02-02 | 1984-08-16 | 松下電器産業株式会社 | 可撓性プリント配線基板 |
JPH0217627Y2 (en]) * | 1985-01-30 | 1990-05-17 |
-
1985
- 1985-03-29 JP JP60068215A patent/JPS61225527A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61225527A (ja) | 1986-10-07 |
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